Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Journal of Vacuum Science and Technology. Part B. Microelectronics Processing and Phenomena, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 0734-211X
Publisher: American Institute of Physics Publising LLC

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Year	CiteScore	SJR	SNIP
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