IEEE Transactions on Semiconductor Manufacturing

ISSN: 0894-6507
Publisher: Institute of Electrical and Electronics Engineers

---

Web of Science Journals Metrics

Year	Impact Factor	Impact Factor (5 year)
2023	2.3	3.1
2022	2.7	3.2
2021	2.796	2.842

See More (Data from Journal Citation Reports)

AHCI listed:

| SCIE listed:

| SSCI listed:

---

Scopus Journals Metrics

Year	CiteScore	SJR	SNIP
2023	5.2	0.97	1.24
2022	5.4	1.13	1.45
2021	5.8	1.32	1.43