Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics
ISSN: 2166-2746Publisher: A I P Publishing LLC
Web of Science Journals Metrics
| Year | Impact Factor | Impact Factor (5 year) |
|---|---|---|
| 2023 | 1.5 | 1.3 |
| 2022 | 1.4 | 1.3 |
| 2021 | 1.572 | 1.445 |
| AHCI listed: |  |
| SCIE listed: |  |
| SSCI listed: | |
Scopus Journals Metrics
| Year | CiteScore | SJR | SNIP |
|---|---|---|---|
| 2023 | 2.7 | 0.33 | 0.7 |
| 2022 | 3 | 0.4 | 0.7 |
| 2021 | 3.1 | 0.42 | 0.64 |
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