Journal of Vacuum Science and Technology A, Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films (Online), Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Journal of Vacuum Science & Technology A

ISSN: 0734-2101
Publisher: AVS Science and Technology Society

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Web of Science Journals Metrics

Year	Impact Factor	Impact Factor (5 year)
2023	2.4	2.6
2022	2.9	2.6
2021	3.234	2.751

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Scopus Journals Metrics

Year	CiteScore	SJR	SNIP
2023	5.1	0.57	0.96
2022	4.9	0.55	0.93
2021	4.4	0.68	0.99